TY  - RPRT
TI  - Site-specific surface reactivity on MgO for atomic layer deposition via selective hydration
AU  - Yan, Chang [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000247061236)
AU  - Xu, Jiayi [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000317636251)
AU  - Muir, Mark [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000318900579)
AU  - Dua, Asare [Illinois Institute of Technology, Chicago, IL (United States)] (ORCID:0000000244303674)
AU  - Hock, Adam [Illinois Institute of Technology, Chicago, IL (United States)]
AU  - Martinson, Alex B.F. [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000339161672)
AU  - Liu, Cong [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000221455034)
PY  - 2025
DO  - 10.1016/j.apsusc.2025.165698
UR  - https://www.osti.gov/biblio/3372185
ID  - 3372185
ER  -