TY  - RPRT
TI  - Surrogate models to optimize plasma-assisted atomic layer deposition in high aspect ratio features
AU  - Yanguas-Gil, Angel [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000182073825)
AU  - Elam, Jeffrey W. [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000258612996)
PY  - 2025
DO  - 10.1063/5.0275766
UR  - https://www.osti.gov/biblio/3374938
ID  - 3374938
ER  -