@misc{indiciaeb215023b3581, title = {MACHINE-LEARNING IMAGE RECONSTRUCTION SPEEDS UP NANOMETROLOGY DATA PROCESSING BY 500X WITHOUT SACRIFICING IMAGE QUALITY}, author = {Dingreville, Remi Philippe Michel and Natinsky, Eva Michelle}, year = {2024}, doi = {10.2172/3378041}, url = {https://www.osti.gov/biblio/3378041}, note = {Source identifier: 3378041} }