@misc{indiciae5859c7f41088,
  title = {Single‐photon emitters in PECVD‐grown silicon nitride films: from material growth to photophysical properties},
  author = {Martin, Zachariah and Senichev, Alexander (ORCID:000000032789123X) and Maan, Pranshu and Ozlu, Mustafa and Marinova, Miroslava and Shang, Zhongxia and Lagutchev, Alexei and Boltasseva, Alexandra (ORCID:0000000189052605) and Shalaev, Vladimir},
  year = {2025},
  doi = {10.1515/nanoph-2024-0506},
  url = {https://www.osti.gov/biblio/3673044},
  note = {Source identifier: 3673044}
}