TY  - RPRT
TI  - Single‐photon emitters in PECVD‐grown silicon nitride films: from material growth to photophysical properties
AU  - Martin, Zachariah
AU  - Senichev, Alexander (ORCID:000000032789123X)
AU  - Maan, Pranshu
AU  - Ozlu, Mustafa
AU  - Marinova, Miroslava
AU  - Shang, Zhongxia
AU  - Lagutchev, Alexei
AU  - Boltasseva, Alexandra (ORCID:0000000189052605)
AU  - Shalaev, Vladimir
PY  - 2025
DO  - 10.1515/nanoph-2024-0506
UR  - https://www.osti.gov/biblio/3673044
ID  - 3673044
ER  -