TY  - RPRT
TI  - Low thermal budget dopant activation in shallow junctions of implanted Si via Tunable plasma enhanced annealing
AU  - Ma, Zhihao [Univ. of Texas at Dallas, Richardson, TX (United States)] (ORCID:0009000386249666)
AU  - Shekarnoush, Mahsa [MicroSol Technologies Inc., Plano, TX (United States)]
AU  - Tian, Yafen [MicroSol Technologies Inc., Plano, TX (United States)]
AU  - Chen, Yuanning [MicroSol Technologies Inc., Plano, TX (United States)]
AU  - Bevan, Malcolm [MicroSol Technologies Inc., Plano, TX (United States)]
AU  - Stiegler, Harvey [MicroSol Technologies Inc., Plano, TX (United States)]
AU  - Overzet, Lawrence J. [Univ. of Texas at Dallas, Richardson, TX (United States)] (ORCID:0000000172770387)
PY  - 2027
DO  - 10.1016/j.apsusc.2026.168201
UR  - https://www.osti.gov/biblio/3757816
ID  - 3757816
ER  -