@misc{indiciae7197bf683532,
  title = {Characterization of electron microscopes with binary pseudo-random multilayer test samples},
  author = {Yashchuk, Valeriy V and Conley, Raymond and Anderson, Erik H and Barber, Samuel K and Bouet, Nathalie and McKinney, Wayne R and Takacs, Peter Z and Voronov, Dmitriy L},
  year = {2010},
  url = {https://www.osti.gov/biblio/986498},
  note = {Source identifier: 986498}
}