@misc{indiciaeb3612cb567c8, title = {Catalyst for microelectromechanical systems microreactors}, author = {Morse, Jeffrey D and Sopchak, David A and Upadhye, Ravindra S and Reynolds, John G and Satcher, Joseph H and Gash, Alex E}, year = {2010}, url = {https://www.osti.gov/biblio/993135}, note = {Source identifier: 993135} }