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NASA NTRS · 19660014818

Sputtering ion source study program Final report, 29 Jan. - 15 Nov. 1962

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Abstract

Design, construction, assembly, and operation of ion source for solids

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ION SOURCE GAS-ION INTERACTION SPUTTERING MASS SPECTROMETER

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1962-12-15. Sputtering ion source study program Final report, 29 Jan. - 15 Nov. 1962. https://ntrs.nasa.gov/citations/19660014818

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