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NASA NTRS · 19660016251

Sputtering ion source study program, phase 1 Final report, 31 Jul. 1961 - 28 Jan. 1962

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Abstract

Design of sputtering ion source for application to analysis of solids

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ION SOURCE SPUTTERING SOLIDS

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1962-01-28. Sputtering ion source study program, phase 1 Final report, 31 Jul. 1961 - 28 Jan. 1962. https://ntrs.nasa.gov/citations/19660016251

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