NASA NTRS · 19660016949
Instruction manual for epitaxial apparatus
Abstract
Instruction manual for apparatus using programmer operation of electronic valves for etching and growth of single crystal silicon, deposition of silicon dioxide, and nucleation site treatment
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Halsor, J. L.. 1965-09-30. Instruction manual for epitaxial apparatus. https://ntrs.nasa.gov/citations/19660016949
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