NASA NTRS · 19660059127
Fabrication methods for lithium drifted surface barrier silicon detectors.
Abstract
Fabrication methods for lithium drifted surface barrier silicon detectors, discussing lithium diffusion, stain etching, preparation for and final etch
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Casper, K. J., Harpster, J. W., Murray, H. M.. 1966-01-01. Fabrication methods for lithium drifted surface barrier silicon detectors.. https://ntrs.nasa.gov/citations/19660059127
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