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NASA NTRS · 19670022241

An improved spatterproof vacuum evaporation source

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Abstract

Improved spatterproof vacuum evaporation source for use in depositing thin solid films on substrate

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METAL FILM VACUUM DEPOSITION THIN FILM CARTRIDGE EVAPORATION

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Adams, G. D.. 1967-06-01. An improved spatterproof vacuum evaporation source. https://ntrs.nasa.gov/citations/19670022241

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