NASA NTRS · 19670022270
Evaluation of semiconductor devices using the scanning electron microscope
Abstract
Scanning electron microscope for evaluating failure mechanisms in semiconductor devices, and for three-dimensional representation of biological specimens
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Berryman, G., Edwards, T. R.. 1967-06-01. Evaluation of semiconductor devices using the scanning electron microscope. https://ntrs.nasa.gov/citations/19670022270
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