NASA NTRS · 19670052327
Evidence against focused chains in high-yield copper sputtering.
Abstract
Yield and angular distribution of cesium ion- sputtered copper, noting dependence on angle of incidence, target temperature and energy
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Olson, N. T., Smith, H. P., Jr.. 1967-05-10. Evidence against focused chains in high-yield copper sputtering.. https://ntrs.nasa.gov/citations/19670052327
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