NASA NTRS · 19680000452
Hydrogen peroxide etching proves useful for germanium
Abstract
Influence of process variations in the etching of germanium with hydrogen peroxide has been studied, along with damage effects due to radiation. The work advances the knowledge of the etching process for germanium.
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Dayal, Y., Kampwirth, R., Primak, W.. 1968-12-01. Hydrogen peroxide etching proves useful for germanium. https://ntrs.nasa.gov/citations/19680000452
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