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NASA NTRS ยท 19680000518

Reliable method for testing gross leaks in semiconductor component packages

Abstract

Simple, reliable, inexpensive method for gross-leak testing has been devised, based upon the conventional fine-leak technique. The sensitivity ranges from the detection of very large leaks down to leaks of 10 to the minus seven cc helium per sec.

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BibTeXRIS

Altshuler, T. L.. 1968-12-01. Reliable method for testing gross leaks in semiconductor component packages. https://ntrs.nasa.gov/citations/19680000518

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