NASA NTRS · 19680023657
Development, construction and testing of an ultrahigh vacuum dc sputtering system Final report
Abstract
Design and performance of ultrahigh vacuum system for direct current sputtering electrodes
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Gould, P., Horn, G.. 1968-07-01. Development, construction and testing of an ultrahigh vacuum dc sputtering system Final report. https://ntrs.nasa.gov/citations/19680023657
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