NASA NTRS · 19700032072
Apollo communication systems support. Task 8b-RF sputtering system, task 8c-high ohms/square resistive films Final report
Abstract
RF sputtering system and techniques for sputtering high ohms/square resistive films to form thin film resistors used in Apollo communication systems
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1970-08-01. Apollo communication systems support. Task 8b-RF sputtering system, task 8c-high ohms/square resistive films Final report. https://ntrs.nasa.gov/citations/19700032072
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