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NASA NTRS ยท 19700049250

Application of scanning electron microscopy to integrated circuit failure

Abstract

Integrated circuit failure analysis with scanning electron microscopy taking into account ball bond contamination and open metallization at contact windows

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BibTeXRIS

Devaney, J. R.. 1970-03-01. Application of scanning electron microscopy to integrated circuit failure. https://ntrs.nasa.gov/citations/19700049250

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