NASA NTRS · 19720000533
Sputter etching of hemispherical bearings
Abstract
Technique was developed for fabricating three dimensional pumping grooves on gas bearings by sputter etching. Method eliminates problems such as groove nonuniformity, profile, and finish, which are associated with normal grooving methods.
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Schiesser, R. J.. 1972-09-01. Sputter etching of hemispherical bearings. https://ntrs.nasa.gov/citations/19720000533
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