NASA NTRS · 19720017820
Sputtering and ion plating
Abstract
The proceedings of a conference on sputtering and ion plating are presented. Subjects discussed are: (1) concepts and applications of ion plating, (2) sputtering for deposition of solid film lubricants, (3) commercial ion plating equipment, (4) industrial potential for ion plating and sputtering, and (5) fundamentals of RF and DC sputtering.
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1972-01-01. Sputtering and ion plating. https://ntrs.nasa.gov/citations/19720017820
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