NASA NTRS · 19720037259
A thin film, high sensitivity, two terminal, semiconductor strain sensor.
Abstract
A two terminal semiconductor strain sensor which makes use of an evaporated piezoelectric layer to modulate the forward current-voltage characteristics of a thin film diode is described. The physical mechanisms are discussed and compared to other types of semiconductor sensors. Application to the electromechanical design of ultraminiature pressure transducers is discussed.
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Mallon, J. R.. 1971-01-01. A thin film, high sensitivity, two terminal, semiconductor strain sensor.. https://ntrs.nasa.gov/citations/19720037259
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