NASA NTRS · 19720040574
Profiling with the electron microscope.
Abstract
Discussion of a profiling technique using a scanning electron microscope for obtaining depth information on a single micrograph of a small specimen. A stationary electron beam is used to form a series of contamination spots in a line across the specimen. Micrographs obtained by this technique are useful as a means of projection and display where stereo viewers are not practical.
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Vedder, J. F., Lem, H. Y.. 1972-03-01. Profiling with the electron microscope.. https://ntrs.nasa.gov/citations/19720040574
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