Quadrupole ion pump performance characteristics.

Abstract

A new nonmagnetic ion pump is described that resembles a quadrupole ionization gauge. The dimensions are larger, and hyperbolically shaped electrodes replace the four rods. Pumping speeds (4-100 liters per sec) for different gases at various peak voltages (1000-3000 V) at corresponding frequencies (57-100 MHz) and at different pressures (10 microtorr to 1 nanotorr) are reported.