NASA NTRS · 19730000096
Fabrication of magnetic bubble memory overlay
Abstract
Self-contained magnetic bubble memory overlay is fabricated by process that employs epitaxial deposition to form multi-layered complex of magnetically active components on single chip. Overlay fabrication comprises three metal deposition steps followed by subtractive etch.
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1973-03-01. Fabrication of magnetic bubble memory overlay. https://ntrs.nasa.gov/citations/19730000096
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