NASA NTRS · 19730000327
Laser scanner for testing semiconductor chips
Abstract
Individual ''fingerprint'' signals are produced when system photoexcites chips. ''Fingerprints'' are analyzed for characteristics associated with defects, including many not visible to the naked eye. Electromagnetic radiation photogenerates free electrons and holes in semiconductor chip. These carriers produce electrical signals at terminals. Signals vary depending on what defects are present.
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Hall, T. C.. 1973-10-01. Laser scanner for testing semiconductor chips. https://ntrs.nasa.gov/citations/19730000327
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