NASA NTRS · 19740039062
Fabrication of small microbridges
Abstract
A simple, versatile technique for making very small, sturdy, reproducible microbridges is described. When exposed to air, to mechanical shock, or to repeated temperature cycling, the junctions do not deteriorate over long times. They can be as small as 2,000 A wide by 1,000 A long. Methods for obtaining strongly adherent, small-grained, homogeneous tin film, and for the protection of the junctions from electrical pulses, are also described.
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Chiao, R. Y., Feldman, M. J., Ohta, H., Parrish, P. T.. 1974-01-01. Fabrication of small microbridges. https://ntrs.nasa.gov/citations/19740039062
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