NASA NTRS ยท 19750014086
Evaluation of semiconductor specimens by X-ray analysis
Abstract
Germanium and GaAs crystals were investigated for studies on photovoltaic effects, chemical etching and epitaxial growth according to the overall objective to assess the defect structure of single crystalline materials. A brief survey of basic theory and topographical techniques is provided; examples of topographs are presented.
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Walter, H. U.. 1975-03-01. Evaluation of semiconductor specimens by X-ray analysis. https://ntrs.nasa.gov/citations/19750014086
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