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NASA NTRS ยท 19750014086

Evaluation of semiconductor specimens by X-ray analysis

Abstract

Germanium and GaAs crystals were investigated for studies on photovoltaic effects, chemical etching and epitaxial growth according to the overall objective to assess the defect structure of single crystalline materials. A brief survey of basic theory and topographical techniques is provided; examples of topographs are presented.

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BibTeXRIS

Walter, H. U.. 1975-03-01. Evaluation of semiconductor specimens by X-ray analysis. https://ntrs.nasa.gov/citations/19750014086

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