Development of a thin film solid state gaseous HCl sensor

Abstract

The selection of materials to develop a thin film HCl sensor is discussed. Data were primarily concerned with chemical and physical properties of the film and with electrical properties which exhibit and enhance electrical response when HCl is absorbed on the film surface. Techniques investigated for enhancing electrical response include changing conditions for growing films, adding impurities to the film, changing ambient light intensity, and altering the ambient temperature of the sensing element.