NASA NTRS · 19770000239
Polyimide thin-film dielectrics on ferroelectrics
Abstract
Conducting layers of multi-layered thin-film ferroelectric device, such as is used in liquid crystal/ferroelectric display, can be electrically isolated using thin-film layer of polyimide. Ease of application and high electrical-breakdown strength allow dependable and economical means of providing dielectric for other thin-film microelectronic devices.
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Galiardi, R. V.. 1977-09-01. Polyimide thin-film dielectrics on ferroelectrics. https://ntrs.nasa.gov/citations/19770000239
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