Testing thinned, backside illuminated CCD area image sensors

Abstract

Test techniques were developed making use of computer processing of the video data. The results of testing device noise and nonuniformity were obtained. Read-out noise levels of 25 to 50 electrons rms and uncorrected nonuniformity of response of about 1 to 3% were measured. A simple technique for linearly correcting nonuniformity was described and examples given. The technique was shown to be successful in reducing nonuniformity to the level of random noise.