Development of a high temperature capacitive pressure transducer

Abstract

High temperature pressure transducers capable of continuous operation while exposed to 650 C were developed and evaluated over a full-scale differential pressure range of + or - 69 kPa. The design of the pressure transducers was based on the use of a diaphragm to respond to pressure, variable capacitive elements arranged to operate as a differential capacitor to measure diaphragm response and on the use of fused silica for the diaphragm and its supporting assembly. The uncertainty associated with measuring + or - 69 kPa pressures between 20C and 650C was less than + or - 6%.