NASA NTRS · 19780000158
Analyzing CMOS/SOS fabrication for LSI arrays
Abstract
Report discusses set of design rules that have been developed as result of work with test arrays. Set of optimum dimensions is given that would maximize process output and would correspondingly minimize costs in fabrication of large-scale integration (LSI) arrays.
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Ipri, A. C.. 1978-10-01. Analyzing CMOS/SOS fabrication for LSI arrays. https://ntrs.nasa.gov/citations/19780000158
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