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NASA NTRS ยท 19780000581

Controlling the growth of silicon sheets

Abstract

Automated systems regulates sheet width, thickness, and composition. Deviations from preset brightness levels create error signals that alter gas flow, crystal-pulling speed, and melt temperature to produce uniform single-crystal sheets.

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BibTeXRIS

Ciszek, T. F.. 1979-03-01. Controlling the growth of silicon sheets. https://ntrs.nasa.gov/citations/19780000581

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