NASA NTRS · 19780014949
Sputter metalization of Wolter type optical elements
Abstract
An analytical task showed that the coating thickness distribution for both internal and external optical elements coated using either electron beam or sputter sources can be made uniform and will not affect the surface figure of coated elements. Also, sputtered samples of nickel, molybdenum, iridium and ruthenium deposited onto both hot and cold substrates showed excellent adhesion.
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Ledger, A. M.. 1977-08-01. Sputter metalization of Wolter type optical elements. https://ntrs.nasa.gov/citations/19780014949
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