NASA NTRS · 19790000287
Lift-off procedure improves pattern definition
Abstract
Layer of TiO2, economically deposited during integrated circuit fabrication, allows "nonpattern" metal to be removed cleanly.
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Hovel, H. J., Huggins, H. A.. 1979-12-01. Lift-off procedure improves pattern definition. https://ntrs.nasa.gov/citations/19790000287
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