NASA NTRS · 19790021262
Accelerated life testing effects on CMOS microcircuit characteristics
Abstract
Modifications and additions to the present process of making CMOS microcircuits which are designed to provide protective layers on the chip to guard against moisture and contaminants were investigated. High and low temperature Si3N4 protective layers were tested on the CMOS microcircuits and no conclusive improvements in device reliability characteristics were evidenced.
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1979-06-01. Accelerated life testing effects on CMOS microcircuit characteristics. https://ntrs.nasa.gov/citations/19790021262
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