NASA NTRS · 19790023606
Low-cost Solar Array Project. Feasibility of the Silane Process for Producing Semiconductor-grade Silicon
Abstract
The feasibility of Union Carbide's silane process for commercial application was established. An integrated process design for an experimental process system development unit and a commercial facility were developed. The corresponding commercial plant economic performance was then estimated.
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1979-06-01. Low-cost Solar Array Project. Feasibility of the Silane Process for Producing Semiconductor-grade Silicon. https://ntrs.nasa.gov/citations/19790023606
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