NASA NTRS · 19800000511
Bulk lifetime indicates surface contamination
Abstract
Indirect measurement of wafer surface impurities has sensitivity of 300 monolayers. Photoconductivity-decay apparatus determines bulk recombination lifetime in semiconductor materials. Bulk impurity levels before and after annealing relate to level of surface contamination. Method evaluates wafer cleaning techniques, qualifying purity of chemical and deionized water used, or monitors production process.
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Blais, P. D.. 1981-04-01. Bulk lifetime indicates surface contamination. https://ntrs.nasa.gov/citations/19800000511
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