NASA NTRS · 19800000552
CADAT integrated circuit artwork program
Abstract
Versatile, ready-to-use program (ARTWORK) converts artwork data into mask patterns. ARTWORK generates signals for controlling mask-fabricating equipment. Extensive utility package enables user to create new pattern libraries, develop and incorporate new cells, and perform systems orientation functions. Program is written in FORTRAN IV.
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Kvelthau, R. L.. 1981-04-01. CADAT integrated circuit artwork program. https://ntrs.nasa.gov/citations/19800000552
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