NASA NTRS · 19800009164
Miniature piezoresistive solid state integrated pressure sensors
Abstract
The characteristics of silicon pressure sensors with an ultra-small diaphragm are described. The pressure sensors utilize rectangular diaphragm as small as 0.0127 x 0.0254 cm and a p-type Wheatstone bridge consisting of diffused piezoresistive elements, 0.000254 cm by 0.00254 cm. These sensors exhibit as high as 0.5 MHz natural frequency and 1 mV/V/psi pressure sensitivity. Fabrication techniques and high frequency results from shock tube testing and low frequency comparison with microphones are presented.
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Kahng, S. K.. 1980-02-01. Miniature piezoresistive solid state integrated pressure sensors. https://ntrs.nasa.gov/citations/19800009164
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