NASA NTRS · 19810000097
Automatic Control of Silicon Melt Level
Abstract
A new circuit, when combined with melt-replenishment system and melt level sensor, offers continuous closed-loop automatic control of melt-level during web growth. Installed on silicon-web furnace, circuit controls melt-level to within 0.1 mm for as long as 8 hours. Circuit affords greater area growth rate and higher web quality, automatic melt-level control also allows semiautomatic growth of web over long periods which can greatly reduce costs.
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Duncan, C. S., Stickel, W. B.. 1982-09-01. Automatic Control of Silicon Melt Level. https://ntrs.nasa.gov/citations/19810000097
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