Use of cryopumps on large space simulation systems

Abstract

The need for clean, oil free space simulation systems has demanded the development of large, clean pumping systems. The assurance of optically dense liquid nitrogen baffles over diffusion pumps prevents backstreaming to a large extent, but does not preclude contamination from accidents or a control failure. Turbomolecular pumps or ion pumps achieve oil free systems but are only practical for relatively small chambers. Large cryopumps were developed and checked out which do achieve clean pumping of very large chambers. These pumps can be used as the original pumping system or can be retrofitted as a replacement for existing diffusion pumps.