NASA NTRS · 19810016786
Semiconductor technology program. Progress briefs
Abstract
Measurement technology for semiconductor materials, process control, and devices is reviewed. Activities include: optical linewidth and thermal resistance measurements; device modeling; dopant density profiles; resonance ionization spectroscopy; and deep level measurements. Standardized oxide charge terminology is also described.
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Bullis, W. M.. 1980-10-01. Semiconductor technology program. Progress briefs. https://ntrs.nasa.gov/citations/19810016786
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