Large area silicon sheet by EFG

Abstract

A multiple growth run with three 10 cm cartridges was carried out with the best throughput rates and time percentage of simultaneous three ribbon growth achieved to date in this system. Growth speeds were between 3.2 and 3.6 cm/minute on all three cartridges and simultaneous full width growth of three ribbons was achieved 47 percent of the time over the eight hour duration of the experiment. Improvements in instrumentation and in the main zone temperature uniformity were two factors that have led to more reproducible growth conditions in the multiple ribbon furnace.