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NASA NTRS · 19810017722

Surface acoustic waves/silicon monolithic sensor processor

Abstract

Progress is reported in the creation of a two dimensional Fourier transformer for optical images based on the zinc oxide on silicon technology. The sputtering of zinc oxide films using a micro etch system and the possibility of a spray-on technique based on zinc chloride dissolved in alcohol solution are discussed. Refinements to techniques for making platinum silicide Schottky barrier junctions essential for constructing the ultimate convolver structure are described.

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BibTeXRIS

Kowel, S. T., Kornreich, P. G., Fathimulla, M. A., Mehter, E. A.. 1981-06-01. Surface acoustic waves/silicon monolithic sensor processor. https://ntrs.nasa.gov/citations/19810017722

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