Head for high speed spinner having a vacuum chuck

Abstract

The head for a high-speed spinner is characterized by a substantially cylindrical body adapted to be mounted at the distal end of a vertically oriented drive shaft. A vacuum chuck with an upwardly facing chamber is circumscribed by an annular surface for receiving in supported relation a silicon chip. An ordered array of low-pressure cavities is defined about the periphery of the body and connected in communication with the chamber via radially extended bores in order to translate low pressures to the chamber as the head is angularly displaced. A pressure differential is thereby established across the chip for securing it to the head.