NASA NTRS · 19810025065
Low-cost solar array project task 1: Silicon material. Gaseous melt replenishment system
Abstract
The operation of a silicon production technique was demonstrated. The essentials of the method comprise chemical vapor deposition of silicon, by hydrogen reduction of chlorosilanes, on the inside of a quartz reaction vessel having large internal surface area. The system was designed to allow successive deposition-melting cycles, with silicon removal being accomplished by discharging the molten silicon. The liquid product would be suitable for transfer to a crystal growth process, casting into solid form, or production of shots. A scaled-down prototype reactor demonstrated single pass conversion efficiency of 20 percent and deposition rates and energy consumption better than conventional Siemens reactors, via deposition rates of 365 microns/hr. and electrical consumption of 35 Kwhr/kg of silicon produced.
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Jewett, D. N., Bates, H. E., Hill, D. M.. 1980-10-01. Low-cost solar array project task 1: Silicon material. Gaseous melt replenishment system. https://ntrs.nasa.gov/citations/19810025065
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