NASA NTRS · 19820000002
Long-Life/Low-Power Ion-Gun Cathode
Abstract
New cathode has form of hollow tube through which gas enters region of high electron density, produced by electric discharge with auxiliary electrode referred to as "keeper." Ion-gun cathode emits electrons that bombard gas in chamber. Ions accelerated out of source are used to dope semiconductor material.
Keep this discovery
Explore connections, maps & timelines
Fitzgerald, D. J.. 1982-12-01. Long-Life/Low-Power Ion-Gun Cathode. https://ntrs.nasa.gov/citations/19820000002
Cite the original work for its findings. Save a collection to share your selection of sources.